SURFACE SOFTENING IN SILICON BY ION-IMPLANTATION

被引：120
|
作者：
BURNETT, PJ
PAGE, TF
机构：
来源：
JOURNAL OF MATERIALS SCIENCE | 1984年 / 19卷 / 03期
关键词：
D O I：
10.1007/BF00540455
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：845 / 860
页数：16
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