LOW-RESISTIVITY INDIUM TIN OXIDE-FILMS BY PULSED-LASER DEPOSITION

被引：119
|
作者：
ZHENG, JP [1 ]
KWOK, HS [1 ]
机构：
[1] SUNY Buffalo, DEPT ELECT & COMP ENGN, BUFFALO, NY 14260 USA
来源：
APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 01期
关键词：
D O I：
10.1063/1.109736
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Indium tin oxide films were grown by pulsed laser deposition on glass substrates. The electrical and optical properties of these films were studied. At optimized oxygen pressures, films with resistivity values of 1.4 X 10(-4) and 5.6 X 10(-4) OMEGA cm were deposited at substrate temperatures of 310 and 20-degrees-C, respectively. Films with a thickness of 180 nm had a transmission of nearly 100% for the wavelength range of 600-800 nm.
引用
收藏
页码：1 / 3
页数：3
相关论文
共 50 条
  • [31] Pulsed Laser Deposition of Indium Tin Oxide Thin Films on Nanopatterned Glass Substrates
    Socol, Marcela
    Preda, Nicoleta
    Rasoga, Oana
    Costas, Andreea
    Stanculescu, Anca
    Breazu, Carmen
    Gherendi, Florin
    Socol, Gabriel
    COATINGS, 2019, 9 (01):
  • [32] Highly conducting transparent indium tin oxide films prepared by pulsed laser deposition
    Suzuki, A
    Matsushita, T
    Aoki, T
    Mori, A
    Okuda, M
    THIN SOLID FILMS, 2002, 411 (01) : 23 - 27
  • [33] Ultra thin Indium Tin Oxide films on various substrates by pulsed laser deposition
    Sun, XW
    Kim, DH
    Kwok, HS
    THIN-FILM STRUCTURES FOR PHOTOVOLTAICS, 1998, 485 : 267 - 272
  • [34] Electrical and structural properties of indium tin oxide films prepared by pulsed laser deposition
    Izumi, H
    Adurodija, FO
    Kaneyoshi, T
    Ishihara, T
    Yoshioka, H
    Motoyama, M
    JOURNAL OF APPLIED PHYSICS, 2002, 91 (03) : 1213 - 1218
  • [35] Transmittance and resistivity of semicontinuous copper films prepared by pulsed-laser deposition
    So, SK
    Fong, HH
    Yeung, CF
    Cheung, NH
    APPLIED PHYSICS LETTERS, 2000, 77 (08) : 1099 - 1101
  • [36] Indium tin oxide thin films grown on flexible plastic substrates by pulsed-laser deposition for organic light-emitting diodes
    Kim, H
    Horwitz, JS
    Kushto, GP
    Kafafi, ZH
    Chrisey, DB
    APPLIED PHYSICS LETTERS, 2001, 79 (03) : 284 - 286
  • [37] Preparation of Low-Resistivity GZO Thin Films Using Pulsed Laser Deposition and Investigation of Optoelectronic Properties
    Mo Guankong
    Liu Jiahui
    Zou Zhuoliang
    Tang Zimei
    Liu Yulun
    He Huan
    Fu Yuechun
    Shen Xiaoming
    CHINESE JOURNAL OF LASERS-ZHONGGUO JIGUANG, 2019, 46 (10):
  • [38] Indium tin oxide films with low resistivity and low internal stress
    Takayama, S
    Sugawara, T
    Tanaka, A
    Himuro, T
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2003, 21 (04): : 1351 - 1354
  • [39] Transparent conductive oxide thin films of CdTe-doped indium oxide prepared by pulsed-laser deposition
    Carnacho, Juan M.
    Castro-Rodriguez, R.
    Pena, J. L.
    OPTICS AND LASER TECHNOLOGY, 2008, 40 (07): : 895 - 900
  • [40] Pulsed laser deposition of crystalline indium tin oxide films at room temperature by substrate laser irradiation
    Adurodija, FO
    Izumi, H
    Ishihara, T
    Yoshioka, H
    Motoyama, M
    Murai, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 2000, 39 (4B): : L377 - L379
12345