ELECTROMIGRATION IN AL THIN-FILMS

被引:4
|
作者
PAI, ST
MARTON, JP
BEATTY, DC
机构
[1] WELWYN CANADA LTD,LONDON N6A 4G7,ONTARIO,CANADA
[2] MCMASTER UNIV,HAMILTON L8S 4M1,ONTARIO,CANADA
关键词
D O I
10.1139/p77-014
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:116 / 128
页数:13
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