ELECTROMIGRATION IN AL-CU THIN-FILMS WITH POLYIMIDE PASSIVATION

被引：17
|
作者：
LLOYD, JR
机构：
来源：
THIN SOLID FILMS | 1982年 / 91卷 / 02期
关键词：
D O I：
10.1016/0040-6090(82)90431-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：175 / 182
页数：8
相关论文
共 50 条
  • [1] ELECTROMIGRATION IN SPUTTERED AL-CU THIN-FILMS
    RODBELL, KP
    SHATYNSKI, SR
    [J]. THIN SOLID FILMS, 1983, 108 (01) : 95 - 102
  • [2] ELECTROMIGRATION IN A1/CU THIN-FILMS WITH POLYIMIDE PASSIVATION
    LLOYD, JR
    [J]. THIN SOLID FILMS, 1981, 83 (02) : 207 - 207
  • [3] PHASE SEGREGATION OF CU IN AL-CU THIN-FILMS
    BURKSTRAND, JM
    HOVLAND, CT
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02): : 449 - 451
  • [4] PITTING CORROSION IN AL-CU THIN-FILMS
    SMITH, PJ
    WILDMAN, HS
    LEIGHTON, A
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (08) : C332 - C332
  • [5] ELECTROMIGRATION IN AL THIN-FILMS
    PAI, ST
    MARTON, JP
    BEATTY, DC
    [J]. CANADIAN JOURNAL OF PHYSICS, 1977, 55 (02) : 116 - 128
  • [6] STRESS-RELAXATION IN AL-CU THIN-FILMS
    SHUTE, CJ
    COHEN, JB
    [J]. MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1992, 149 (02): : 167 - 172
  • [7] THERMOMECHANICALLY INDUCED VOIDING OF AL-CU THIN-FILMS
    WHITMAN, CS
    CHUNG, YW
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (04): : 2516 - 2522
  • [8] CORROSION BEHAVIOR OF AL-CU ALLOY THIN-FILMS
    ZAHAVI, J
    ROTEL, M
    HUANG, HCW
    TOTTA, PA
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (08) : C301 - C301
  • [9] ELECTROMIGRATION BEHAVIOR OF AL-CU-SI THIN-FILMS
    BERENBAUM, L
    THORPE, WR
    DIGIACOMO, G
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (03) : C93 - C93
  • [10] DIFFUSION OF SILICON ON AL-CU THIN-FILMS OF INTEGRATED-CIRCUITS
    DUMOULIN, P
    MARCE, P
    MAYEUX, A
    DUBOIS, B
    [J]. COMPTES RENDUS HEBDOMADAIRES DES SEANCES DE L ACADEMIE DES SCIENCES SERIE C, 1975, 281 (23): : 983 - 986
12345