共 50 条
- [1] GAS PLASMA-ETCHING OF CHROMIUM FILMS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (08) : C327 - C327
- [2] GAS PLASMA-ETCHING OF ION-IMPLANTED CHROMIUM FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (06): : 1348 - 1350
- [5] PLASMA-ETCHING CHARACTERISTICS OF CHROMIUM FILM AND ITS NOVEL ETCHING MODE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (06): : 1351 - 1357