ANOMALOUS HEAT-CONDUCTION OF ION-IMPLANTED AMORPHOUS LAYERS IN SILICON-CRYSTALS USING A LASER-PROBE TECHNIQUE

被引：8
|
作者：
GOLDSMID, HJ
HORA, H
PAUL, GL
机构：
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1984年 / 81卷 / 02期
关键词：
D O I：
10.1002/pssa.2210810248
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：K127 / K130
页数：4
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