ANALYSIS OF ION-IMPLANTED DIAMOND-LIKE-CARBON FILMS USING LASER-INDUCED TRANSIENT REFLECTING GRATING TECHNIQUE

被引：1
|
作者：
SHEN, Q
HARATA, A
SAWADA, T
机构：
[1] Univ of Tokyo, Tokyo
来源：
JOURNAL DE PHYSIQUE IV | 1994年 / 4卷 / C7期
关键词：
D O I：
10.1051/jp4:1994755
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Laser-induced transient reflecting grating (TRG) technique was applied to measure both nitrogen-ion-implanted and nonimplanted thin-film coatings (thickness, 40nm) of diamond-like-carbon (DLC). Different TRG responses corresponding to the different samples with a variety of nitrogen-ion implantation doses were observed and the hypersonic surface acoustic wave velocities were obtained with a variety of wavelengths. A phenomenon was observed that the SAW velocity of the implanted DLC coating with higher dose became larger than that of the nonimplanted sample.
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页码：233 / 236
页数：4
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