ALNX THIN-FILMS PRODUCED BY DC REACTIVE MAGNETRON SPUTTERING

被引：1
|
作者：
SVUB, J
MUSIL, J
机构：
来源：
CZECHOSLOVAK JOURNAL OF PHYSICS | 1985年 / 35卷 / 10期
关键词：
D O I：
10.1007/BF01596435
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
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页码：1191 / 1192
页数：2
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