PROPERTIES OF SUPERCONDUCTING ZRN THIN-FILMS DEPOSITED BY DC REACTIVE MAGNETRON SPUTTERING

被引：19
|
作者：
TANABE, K
ASANO, H
KATOH, Y
MICHIKAMI, O
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1987年 / 26卷 / 05期
关键词：
D O I：
10.1143/JJAP.26.L570
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：L570 / L572
页数：3
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