MICROINHOMOGENEITIES IN GLOW-DISCHARGE DEPOSITED A-SI-H LAYERS

被引：8
|
作者：
ZENTAI, G
FUSTOSSWEGNER, M
机构：
[1] Central Research Inst for Physics, Budapest, Hung, Central Research Inst for Physics, Budapest, Hung
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 1985年 / 77-8卷
关键词：
D O I：
10.1016/0022-3093(85)90644-1
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
14
引用
收藏
页码：225 / 228
页数：4
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