MICROINHOMOGENEITIES IN GLOW-DISCHARGE DEPOSITED A-SI-H LAYERS

被引：8

作者：

ZENTAI, G

FUSTOSSWEGNER, M

机构：

[1] Central Research Inst for Physics, Budapest, Hung, Central Research Inst for Physics, Budapest, Hung

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1985年 / 77-8卷

关键词：

D O I：

10.1016/0022-3093(85)90644-1

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：225 / 228

页数：4

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