MAGNETICALLY CONFINED DISCHARGE FOR PLASMA-ETCHING

被引：0

作者：

MANTEI, TD ^{[1
]}

WICKER, T ^{[1
]}

机构：

[1] UNIV CINCINNATI,DEPT ELECT & COMP ENGN,CINCINNATI,OH 45221

来源：

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D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C82 / C82

页数：1

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