MAGNETICALLY CONFINED DISCHARGE FOR PLASMA-ETCHING

被引：0
|
作者：
MANTEI, TD [1 ]
WICKER, T [1 ]
机构：
[1] UNIV CINCINNATI,DEPT ELECT & COMP ENGN,CINCINNATI,OH 45221
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
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页码：C82 / C82
页数：1
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