SUBSTRATE BIASING FOR PLASMA-ETCHING

被引：12

|

作者：

MANTEI, TD

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 09期

关键词：

D O I：

10.1149/1.2120130

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：1958 / 1959

页数：2

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