POSSIBILITIES AND LIMITATIONS OF LARGE-SCALE ELECTRON-BEAM EVAPORATION

被引：11

作者：

SCHILLER, S ^{[1
]}

FOERSTER, H ^{[1
]}

JAESCH, G ^{[1
]}

机构：

[1] FORSCH INST MANFRED VON ARDENNE,ZEPPELIN STR 7,8051 DRESDEN,GER DEM REP

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 04期

关键词：

D O I：

10.1116/1.568675

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：800 / 806

页数：7

共 50 条

[1] DESIGN AND OPERATION OF A LARGE-SCALE SEMICONTINUOUS ELECTRON-BEAM EVAPORATOR
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (01): : 53 - 57
[2] LARGE-SCALE RESISTIVE INSTABILITIES OF RELATIVISTIC ELECTRON-BEAM IN PLASMA CHANNELS
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[3] EXPERIENCE WITH LARGE-SCALE ELECTRON-BEAM COLD HEARTH MELTING (EBCHM)
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[J]. SCANNING ELECTRON MICROSCOPY, 1986, 1986 : 465 - 472
[5] SCALE-UP PROBLEMS IN ELECTRON-BEAM EVAPORATION AND SPUTTERING
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[6] ELECTRON-BEAM AND X-RAY LITHOGRAPHY FOR VERY LARGE-SCALE INTEGRATION DEVICES
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[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (03) : C151 - C151
[7] AUTOMATIC ELECTRON-BEAM METROLOGY SYSTEM FOR DEVELOPMENT OF VERY LARGE-SCALE INTEGRATED DEVICES
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[8] ELECTRON-BEAM PROCEDURES .2. INFLUENCE PARAMETERS AND APPLICATIONS TO LARGE-SCALE OPERATIONS
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[9] IMPROVED SECONDARY-ELECTRON SPECTROMETER FOR ELECTRON-BEAM TESTING OF LARGE-SCALE INTEGRATED-CIRCUITS
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[10] EVAPORATION OF METALS BY AN ELECTRON-BEAM OF AN ELECTRON MICROSCOPE
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