IMPROVED SECONDARY-ELECTRON SPECTROMETER FOR ELECTRON-BEAM TESTING OF LARGE-SCALE INTEGRATED-CIRCUITS

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作者：

SUVORINOV, AV

FILIPCHUK, TS

SHAKHBAZOV, SY

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IZVESTIYA AKADEMII NAUK SSSR SERIYA FIZICHESKAYA | 1992年 / 56卷 / 03期

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O4 [物理学];

学科分类号：

0702 ;

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页码：138 / 142

页数：5

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