IMPROVED SECONDARY-ELECTRON SPECTROMETER FOR ELECTRON-BEAM TESTING OF LARGE-SCALE INTEGRATED-CIRCUITS

被引：0

作者：

SUVORINOV, AV

FILIPCHUK, TS

SHAKHBAZOV, SY

机构：

来源：

IZVESTIYA AKADEMII NAUK SSSR SERIYA FIZICHESKAYA | 1992年 / 56卷 / 03期

关键词：

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：138 / 142

页数：5

共 50 条

[41] TECHNIQUES FOR THE SIMULATION OF LARGE-SCALE INTEGRATED-CIRCUITS
NEWTON, AR
[J]. IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS, 1979, 26 (09): : 741 - 749
[42] POSSIBILITIES AND LIMITATIONS OF LARGE-SCALE ELECTRON-BEAM EVAPORATION
SCHILLER, S
FOERSTER, H
JAESCH, G
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (04): : 800 - 806
[43] RESTORATION OF SECONDARY-ELECTRON IMAGES DEGRADED BY PRIMARY ELECTRON-BEAM PROFILES
NAKAMAE, K
YAMAMOTO, M
KOBAYASHI, H
FUJIOKA, H
[J]. JOURNAL OF ELECTRON MICROSCOPY, 1994, 43 (02): : 84 - 88
[44] S-ELEMENT INTEGRATED-CIRCUITS .2. LARGE-SCALE INTEGRATED-CIRCUITS
ZOLOTAREV, JG
KOMAROVSKIKH, KF
STAFEEV, VI
[J]. AVTOMATIKA I VYCHISLITELNAYA TEKHNIKA, 1978, (01): : 88 - 88
[45] Electron beam testing of wafer-scale integrated circuits
Heiland, Robert
Fox, Fred
Goerlich, Siegfried
[J]. Microelectronic Engineering, 1990, 12 (1-4) : 259 - 266
[46] ELECTRON-BEAM TESTING AND ITS APPLICATION TO PACKAGING MODULES FOR VERY LARGE-SCALE INTEGRATED (VLSI) CHIP ARRAYS
HOHN, FJ
CHANG, THP
KERN, D
BRUENGER, W
COANE, P
LINDEMANN, M
[J]. PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1982, 333 : 83 - 88
[47] A DIRECT WRITING ELECTRON-BEAM LITHOGRAPHY BASED PROCESS FOR THE REALIZATION OF OPTOELECTRONIC INTEGRATED-CIRCUITS
HUGHES, WA
BARNARD, JA
[J]. PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1985, 517 : 28 - 33
[48] ELECTRON-BEAM CUSTOMIZATION, REPAIR, AND TESTING OF WAFER-SCALE CIRCUITS
SHAVER, DC
[J]. SOLID STATE TECHNOLOGY, 1984, 27 (02) : 135 - 139
[49] AUTOMATIC ELECTRON-BEAM METROLOGY SYSTEM FOR DEVELOPMENT OF VERY LARGE-SCALE INTEGRATED DEVICES
MATSUOKA, G
ICHIHASI, M
MURAKOSHI, H
YAMAMOTO, K
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01): : 79 - 83
[50] LIMIT CURRENTS OF THE ELECTRON-BEAM VALVE TAKING INTO ACCOUNT SECONDARY-ELECTRON EMISSION
GORSHKOV, VS
NAGUCHEV, OY
[J]. RADIOTEKHNIKA I ELEKTRONIKA, 1985, 30 (12): : 2459 - 2462

← 1 2 3 4 5 →