AUTOMATIC ELECTRON-BEAM METROLOGY SYSTEM FOR DEVELOPMENT OF VERY LARGE-SCALE INTEGRATED DEVICES

被引：5

|

作者：

MATSUOKA, G

ICHIHASI, M

MURAKOSHI, H

YAMAMOTO, K

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 01期

关键词：

D O I：

10.1116/1.583932

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

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页码：79 / 83

页数：5

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