共 50 条
- [1] FUNDAMENTALS OF ELECTRON-BEAM TESTING OF INTEGRATED-CIRCUITS [J]. SCANNING, 1983, 5 (03) : 103 - 122
- [2] TECHNIQUES FOR ELECTRON-BEAM TESTING AND RESTRUCTURING INTEGRATED-CIRCUITS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1010 - 1013
- [3] ELECTRON-BEAM TESTING OF INTEGRATED-CIRCUITS WITH MULTILEVEL METAL [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06): : 2037 - 2040
- [4] ELECTRON-BEAM PROBING OF INTEGRATED-CIRCUITS [J]. SOLID STATE TECHNOLOGY, 1985, 28 (12) : 63 - 70
- [5] ELECTRON-BEAM TEST TECHNIQUES FOR INTEGRATED-CIRCUITS [J]. SCANNING ELECTRON MICROSCOPY, 1981, : 305 - 322
- [6] ELECTRON-BEAM SYSTEM TO FABRICATE INTEGRATED-CIRCUITS [J]. JOURNAL OF THE FRANKLIN INSTITUTE-ENGINEERING AND APPLIED MATHEMATICS, 1973, 296 (06): : 403 - &
- [8] ELECTRON DETECTORS FOR ELECTRON-BEAM TESTING OF ULTRA LARGE-SCALE INTEGRATED-CIRCUITS [J]. SCANNING ELECTRON MICROSCOPY, 1986, 1986 : 465 - 472
- [9] ELECTRON AND OPTICAL BEAM TESTING OF INTEGRATED-CIRCUITS [J]. REVUE DE PHYSIQUE APPLIQUEE, 1989, 24 (06): : 129 - 143
- [10] AN APPLICATION OF FOCUSED ION-BEAMS TO ELECTRON-BEAM TESTING OF INTEGRATED-CIRCUITS [J]. PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1984, 471 : 38 - 46