ELECTRON-BEAM MICROFABRICATION OF GAAS INTEGRATED-CIRCUITS

被引：0

作者：

OZDEMIR, FS ^{[1
]}

HACKETT, LH ^{[1
]}

GREILING, PT ^{[1
]}

KRUMM, CF ^{[1
]}

OTTO, OW ^{[1
]}

机构：

[1] HUGHES RES LABS,MALIBU,CA 90265

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1978年 / 125卷 / 03期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：C158 / C158

页数：1

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