ELECTRON-BEAM TEST TECHNIQUES FOR INTEGRATED-CIRCUITS

被引：0
|
作者：
MENZEL, E [1 ]
KUBALEK, E [1 ]
机构：
[1] UNIV DUISBURG GESAMTHSCH,WERKSTOFFE ELEKTROTECH,D-4100 DUISBURG,FED REP GER
来源：
SCANNING ELECTRON MICROSCOPY | 1981年
关键词：
D O I：
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中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
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页码：305 / 322
页数：18
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