ELECTRON AND OPTICAL BEAM TESTING OF INTEGRATED-CIRCUITS

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COLLIN, JP

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REVUE DE PHYSIQUE APPLIQUEE | 1989年 / 24卷 / 06期

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O59 [应用物理学];

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页码：129 / 143

页数：15

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[1] ELECTRON AND OPTICAL BEAM TESTING OF INTEGRATED-CIRCUITS - PREFACE
MELGARA, M
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[J]. MICROELECTRONIC ENGINEERING, 1992, 16 (1-4) : R7 - R7
[2] ELECTRON-BEAM TESTING OF INTEGRATED-CIRCUITS
REHME, H
[J]. PHYSICS IN TECHNOLOGY, 1979, 10 (03): : 97 - 103
[3] FUNDAMENTALS OF ELECTRON-BEAM TESTING OF INTEGRATED-CIRCUITS
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KUBALEK, E
[J]. SCANNING, 1983, 5 (03) : 103 - 122
[4] TECHNIQUES FOR ELECTRON-BEAM TESTING AND RESTRUCTURING INTEGRATED-CIRCUITS
SHAVER, DC
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1010 - 1013
[5] ELECTRON-BEAM TESTING OF INTEGRATED-CIRCUITS WITH MULTILEVEL METAL
RADZIMSKI, ZJ
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06): : 2037 - 2040
[6] L-BEAM TESTING OF INTEGRATED-CIRCUITS
HENLEY, FJ
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (03) : C115 - C115
[7] ELECTRON-BEAM PROBING OF INTEGRATED-CIRCUITS
MENZEL, E
BUCHANAN, R
[J]. SOLID STATE TECHNOLOGY, 1985, 28 (12) : 63 - 70
[8] ELECTRON DETECTORS FOR ELECTRON-BEAM TESTING OF ULTRA LARGE-SCALE INTEGRATED-CIRCUITS
GARTH, SCJ
SPICER, DF
[J]. SCANNING ELECTRON MICROSCOPY, 1986, 1986 : 465 - 472
[9] LASER-BEAM TESTING OF FINISHED INTEGRATED-CIRCUITS
AUVERT, G
[J]. INSTITUTE OF PHYSICS CONFERENCE SERIES, 1987, (87): : 563 - 572
[10] ELECTRON-BEAM TEST TECHNIQUES FOR INTEGRATED-CIRCUITS
MENZEL, E
KUBALEK, E
[J]. SCANNING ELECTRON MICROSCOPY, 1981, : 305 - 322

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