ELECTRON-BEAM PROCEDURES .2. INFLUENCE PARAMETERS AND APPLICATIONS TO LARGE-SCALE OPERATIONS

被引：0

作者：

WILLIBALD, K ^{[1
]}

PLATZER, KH ^{[1
]}

WITTIG, S ^{[1
]}

SPIEGEL, G ^{[1
]}

机构：

[1] UNIV KARLSRUHE,INST THERM STROMUNGSMACHINEN,D-7500 KARLSRUHE,FED REP GER

来源：

CHEMIE INGENIEUR TECHNIK | 1988年 / 60卷 / 03期

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D O I：

暂无

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：231 / 231

页数：1

共 50 条

[1] POSSIBILITIES AND LIMITATIONS OF LARGE-SCALE ELECTRON-BEAM EVAPORATION
SCHILLER, S
FOERSTER, H
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (04): : 800 - 806
[2] DESIGN AND OPERATION OF A LARGE-SCALE SEMICONTINUOUS ELECTRON-BEAM EVAPORATOR
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (01): : 53 - 57
[3] LARGE-SCALE RESISTIVE INSTABILITIES OF RELATIVISTIC ELECTRON-BEAM IN PLASMA CHANNELS
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SHULAYEV, NS
[J]. IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII FIZIKA, 1986, 29 (04): : 84 - 89
[4] EXPERIENCE WITH LARGE-SCALE ELECTRON-BEAM COLD HEARTH MELTING (EBCHM)
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[J]. VACUUM, 1990, 41 (7-9) : 2154 - 2156
[5] ELECTRON DETECTORS FOR ELECTRON-BEAM TESTING OF ULTRA LARGE-SCALE INTEGRATED-CIRCUITS
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[J]. SCANNING ELECTRON MICROSCOPY, 1986, 1986 : 465 - 472
[6] ELECTRON-BEAM HARDENING .2. INFLUENCE ON MICROSTRUCTURE AND PROPERTIES
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JOHN, W
RATHJEN, D
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[J]. HEAT TREATMENT OF METALS, 1989, 16 (02): : 43 - 51
[7] AUTOMATIC ELECTRON-BEAM METROLOGY SYSTEM FOR DEVELOPMENT OF VERY LARGE-SCALE INTEGRATED DEVICES
MATSUOKA, G
ICHIHASI, M
MURAKOSHI, H
YAMAMOTO, K
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01): : 79 - 83
[8] ELECTRON-BEAM AND X-RAY LITHOGRAPHY FOR VERY LARGE-SCALE INTEGRATION DEVICES
HAYASHI, T
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (03) : C151 - C151
[9] IMPROVED SECONDARY-ELECTRON SPECTROMETER FOR ELECTRON-BEAM TESTING OF LARGE-SCALE INTEGRATED-CIRCUITS
SUVORINOV, AV
FILIPCHUK, TS
SHAKHBAZOV, SY
[J]. IZVESTIYA AKADEMII NAUK SSSR SERIYA FIZICHESKAYA, 1992, 56 (03): : 138 - 142
[10] APPLICATION OF ELECTRON-BEAM WELDING .2.
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NAGAI, H
[J]. METAL CONSTRUCTION, 1979, 11 (01): : 21 - 25

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