POSSIBILITIES AND LIMITATIONS OF LARGE-SCALE ELECTRON-BEAM EVAPORATION

被引：11
|
作者：
SCHILLER, S [1 ]
FOERSTER, H [1 ]
JAESCH, G [1 ]
机构：
[1] FORSCH INST MANFRED VON ARDENNE,ZEPPELIN STR 7,8051 DRESDEN,GER DEM REP
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 04期
关键词：
D O I：
10.1116/1.568675
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：800 / 806
页数：7
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