ELECTRON-BEAM EVAPORATION SOURCE WITH INTEGRATED RATE CONTROL

被引：0

作者：

WULFF, G ^{[1
]}

机构：

[1] BALZERS AG HOCHVAKUUMTECH & DUNNE SCHICHTEN,FL-9496 BALZERS,LIECHTENSTEIN

来源：

VAKUUM-TECHNIK | 1977年 / 26卷 / 02期

关键词：

D O I：

暂无

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

引用

页码：39 / 48

页数：10

共 50 条

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