ELECTRON-BEAM EVAPORATION SOURCE WITH INTEGRATED RATE CONTROL

被引：0
|
作者：
WULFF, G [1 ]
机构：
[1] BALZERS AG HOCHVAKUUMTECH & DUNNE SCHICHTEN,FL-9496 BALZERS,LIECHTENSTEIN
来源：
VAKUUM-TECHNIK | 1977年 / 26卷 / 02期
关键词：
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
引用
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页码：39 / 48
页数：10
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