ELECTRON-BEAM EVAPORATION SOURCE WITH INTEGRATED RATE CONTROL

被引:0
|
作者
WULFF, G [1 ]
机构
[1] BALZERS AG HOCHVAKUUMTECH & DUNNE SCHICHTEN,FL-9496 BALZERS,LIECHTENSTEIN
来源
VAKUUM-TECHNIK | 1977年 / 26卷 / 02期
关键词
D O I
暂无
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
引用
收藏
页码:39 / 48
页数:10
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