RESISTS FOR FINE-LINE LITHOGRAPHY

被引：6

作者：

HATZAKIS, M

机构：

来源：

关键词：

D O I：

10.1109/PROC.1983.12640

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：570 / 574

页数：5

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