RESISTS FOR FINE-LINE LITHOGRAPHY

被引：6
|
作者：
HATZAKIS, M
机构：
来源：
PROCEEDINGS OF THE IEEE | 1983年 / 71卷 / 05期
关键词：
D O I：
10.1109/PROC.1983.12640
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：570 / 574
页数：5
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