X-RAY-LITHOGRAPHY BIDS FOR SUB-MICRON DOMINANCE

被引：0
|
作者：
LYMAN, J
机构：
来源：
ELECTRONICS | 1985年 / 58卷 / 48期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：45 / 46
页数：2
相关论文
共 50 条
  • [1] SUB-MICRON MOSFET FABRICATION WITH X-RAY-LITHOGRAPHY
    JAEGER, RP
    KARNEZOS, M
    NAKANO, H
    [J]. PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1985, 537 : 75 - 84
  • [2] CHARACTERIZATION TECHNIQUES FOR X-RAY-LITHOGRAPHY SUB-MICRON METROLOGY
    HARRELL, SA
    ALEXANDER, D
    [J]. PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1984, 471 : 103 - 109
  • [3] CALCULATION OF THE PROFILES OF APPEARING SUB-MICRON ELEMENTS DURING X-RAY-LITHOGRAPHY
    LABUNOV, VA
    SHEPUREV, SY
    [J]. DOKLADY AKADEMII NAUK BELARUSI, 1989, 33 (03): : 215 - 217
  • [4] SUB-MICRON X-RAY-LITHOGRAPHY USING LASER-PRODUCED PLASMA AS A SOURCE
    YAAKOBI, B
    KIM, H
    SOURES, JM
    DECKMAN, HW
    DUNSMUIR, J
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02): : 367 - 368
  • [5] SUB-MICRON X-RAY-LITHOGRAPHY USING LASER-PRODUCED PLASMA AS A SOURCE
    YAAKOBI, B
    KIM, H
    SOURES, JM
    DECKMAN, HW
    DUNSMUIR, J
    [J]. APPLIED PHYSICS LETTERS, 1983, 43 (07) : 686 - 688
  • [6] HIGH BRIGHTNESS LASER PLASMA SOURCE FOR HIGH THROUGHPUT SUB-MICRON X-RAY-LITHOGRAPHY
    HOFFMAN, AL
    ALBRECHT, GF
    CRAWFORD, EA
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01): : 258 - 261
  • [7] HIGH BRIGHTNESS LASER PLASMA SOURCE FOR HIGH THROUGHPUT SUB-MICRON X-RAY-LITHOGRAPHY
    HOFFMAN, AL
    ALBRECHT, GF
    CRAWFORD, EA
    ROSE, PH
    [J]. PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1985, 537 : 198 - 205
  • [8] X-RAY REPLICATION SYSTEM FOR SUB-MICRON LITHOGRAPHY
    FAY, B
    [J]. REVUE TECHNIQUE THOMSON-CSF, 1981, 13 (03): : 541 - 576
  • [9] X-RAY-SENSITIVE RESISTS FOR SUB-MICRON LITHOGRAPHY
    ALEKSANDROV, YM
    VALIEV, KA
    VELIKOV, LV
    GLEBOVA, OS
    GRIBOV, BS
    DUSHENKOV, SD
    MOZZHUKHIN, DD
    PLESHIVTSEV, AS
    SELIVANOV, GK
    YAKIMENKO, MN
    [J]. SOVIET MICROELECTRONICS, 1983, 12 (01): : 1 - 8
  • [10] X-RAY-LITHOGRAPHY FOR ONE MICRON LSI
    STOVER, HL
    HAUSE, FL
    MCGREEVY, D
    [J]. SOLID STATE TECHNOLOGY, 1979, 22 (08) : 95 - 100
12345