CHARACTERIZATION OF GAAS FILMS GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION

被引:24
|
作者
SWAMINATHAN, V
VANHAREN, DL
ZILKO, JL
LU, PY
SCHUMAKER, NE
机构
关键词
D O I
10.1063/1.334854
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:5349 / 5353
页数:5
相关论文
共 50 条
  • [41] METALORGANIC CHEMICAL VAPOR-DEPOSITION
    MILLER, LM
    COLEMAN, JJ
    [J]. CRC CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 1988, 15 (01): : 1 - 26
  • [42] GAAS POWER MESFETS PREPARED BY METALORGANIC CHEMICAL VAPOR-DEPOSITION
    SHINO, T
    YANAGAWA, S
    YAMADA, Y
    ARAI, K
    KAMEI, K
    CHIGIRA, T
    NAKANISI, T
    [J]. ELECTRONICS LETTERS, 1981, 17 (20) : 738 - 739
  • [43] PLASMA-ENHANCED METALORGANIC CHEMICAL VAPOR-DEPOSITION OF GAAS
    HUELSMAN, AD
    REIF, R
    FONSTAD, CG
    [J]. APPLIED PHYSICS LETTERS, 1987, 50 (04) : 206 - 208
  • [44] SELECTIVE METALORGANIC CHEMICAL VAPOR-DEPOSITION FOR GAAS PLANAR TECHNOLOGY
    NAKAI, K
    OZEKI, M
    [J]. JOURNAL OF CRYSTAL GROWTH, 1984, 68 (01) : 200 - 205
  • [45] Electrical characterization of InGaP/GaAs heterointerfaccs grown by metalorganic chemical vapor deposition
    Nittono, T
    Fukai, YK
    Hyuga, F
    Maeda, N
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1998, 37 (11A): : L1288 - L1289
  • [46] SIMULATIONS OF METALORGANIC CHEMICAL VAPOR-DEPOSITION AND OF CLUSTER FORMATION ON GAAS
    MENON, M
    ALLEN, RE
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (04): : 729 - 732
  • [47] THE GROWTH OF GAAS ON SI SUBSTRATES BY METALORGANIC CHEMICAL VAPOR-DEPOSITION
    DUPUIS, RD
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (8B) : C484 - C484
  • [48] USE OF TERTIARYBUTYLARSINE IN THE METALORGANIC CHEMICAL VAPOR-DEPOSITION GROWTH OF GAAS
    LUM, RM
    KLINGERT, JK
    LAMONT, MG
    [J]. APPLIED PHYSICS LETTERS, 1987, 50 (05) : 284 - 286
  • [49] STUDY OF EPITAXIAL PLATINUM THIN-FILMS GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION
    KWAK, BS
    FIRST, PN
    ERBIL, A
    WILKENS, BJ
    BUDAI, JD
    CHISHOLM, MF
    BOATNER, LA
    [J]. JOURNAL OF APPLIED PHYSICS, 1992, 72 (08) : 3735 - 3740
  • [50] PHOTOLUMINESCENCE OF CD1-XMNXTE FILMS GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION
    FENG, ZC
    PERKOWITZ, S
    SUDHARSANAN, R
    ERBIL, A
    POLLARD, KT
    ROHATGI, A
    BRADSHAW, JL
    CHOYKE, WJ
    [J]. JOURNAL OF APPLIED PHYSICS, 1989, 66 (04) : 1711 - 1716