ION-IMPLANTATION AND DIFFUSION OF ZN IN GAAS

被引：11
|
作者：
VANGURP, GJ
VANOMMEN, AH
BOUDEWIJN, PR
OOSTHOEK, DP
WILLEMSEN, MFC
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 02期
关键词：
D O I：
10.1063/1.333077
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：338 / 346
页数：9
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