EFFECT OF SUBSTRATE-TEMPERATURE ON MAGNETIC AND MICROSTRUCTURAL PROPERTIES OF SPUTTERED CO-CR FILMS WITH PERPENDICULAR MAGNETIC-ANISOTROPY

被引：4
|
作者：
UCHIYAMA, Y
SATO, H
KITAMOTO, Y
机构：
[1] R&D Center, Digital Equipment Corporation Japan, Hodogaya-Ku
来源：
IEEE TRANSACTIONS ON MAGNETICS | 1992年 / 28卷 / 05期
关键词：
D O I：
10.1109/20.179391
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Abstract-Co-22 at.%Cr films with perpendicular magnetic anisotropy have been sputter-deposited onto glass substrates at various substrate temperatures from room temperature to 230-degrees-C. Microstructural analyses have revealed that Co-Cr films desposited at high substrate temperatures are composed of at least two regions differing in crystallinity, implying a microscopic stratified nature along the film thickness. Correlation of such a microstructure with a segregation mechanism and resultant magnetic properties is described. Further discussion has been made of the origin of the perpendicular magnetic anisotropy.
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页码：2010 / 2017
页数：8
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