ANNEALING EFFECT ON PERPENDICULAR MAGNETIC-ANISOTROPY IN BIAS SPUTTERED CO/PT MULTILAYERS

被引:5
|
作者
HONDA, S
MORITA, N
AGO, J
TAMURA, Y
NAWATE, M
机构
[1] Physical Electronics, Faculty of Engineering, Hiroshima University, Higashi-Hiroshima, 724
关键词
D O I
10.1016/0304-8853(93)91255-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The surface and volume magnetic anisotropies, K(s) and K(v), of Co/Pt multilayers sputter-deposited under substrate bias voltage have been investigated. Annealing in vacuum causes atomic diffusion and the relaxation of stress, resulting in a change in the magnetic anisotropy; K(s) decreases, while K(v) increases.
引用
收藏
页码:506 / 509
页数:4
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