Automatic measurement of electron-beam diameter and astigmatism: BEAMETR

被引：6
|
作者：
Babin, S. [1 ]
Gaevski, M. [2 ]
Joy, D. [3 ,4 ]
Machin, M. [1 ]
Martynov, A. [1 ]
机构：
[1] Abeam Technol, 5286 Dunnigan Ct, Castro Valley, CA 94546 USA
[2] Univ South Carolina, Columbia, SC 29208 USA
[3] Oak Ridge Natl Lab, Oak Ridge, TN 37381 USA
[4] Univ Tennessee, EM Facil, Knoxville, TN 37996 USA
来源：
PROCEEDINGS OF THE SEVENTH INTERNATIONAL CONFERENCE ON CHARGED PARTICLE OPTICS (CPO-7) | 2008年 / 1卷 / 01期
关键词：
Electron probe diameter; Software; SEM resolution;
D O I：
10.1016/j.phpro.2008.07.085
中图分类号：
O412 [相对论、场论]; O572.2 [粒子物理学];
学科分类号：
摘要：
Beam size is one of the major characteristics of any electron beam system. Accuracy and resolution of SEM and an EBL system directly depend on beam diameter; it should be monitored and tuned frequently. Currently used methods are not accurate and are operator dependent. A technique is described to determine beam size using an automatic procedure. In the developed method, a specially designed and fabricated test pattern is scanned using an e-beam. A spectra of the signal is analyzed; beam diameter is automatically determined using a software program. Results of design, fabrication, and analysis of the beam calibration test pattern are presented. (C) 2008 Elsevier B. V. All rights reserved.
引用
收藏
页码：113 / 118
页数：6
相关论文
共 50 条
12345