Nondestructive imaging of the microwave properties of superconducting thin film devices with a scanning microwave near-field microscope

被引:3
|
作者
Feng, YJ [1 ]
Liu, L [1 ]
Liu, QG [1 ]
You, LX [1 ]
Kang, L [1 ]
Yang, SZ [1 ]
Wu, PH [1 ]
机构
[1] Nanjing Univ, Dept Elect Sci & Engn, Nanjing 210093, Peoples R China
基金
中国国家自然科学基金;
关键词
D O I
10.1016/S0921-4534(00)01438-6
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this paper, nondestructive microwave scanning techniques have been used to image the local microwave properties of planar microwave devices. A coaxial cavity, together with a niobium tip, has been used as a probe in the scanning microwave near-field microscope. Quantitative images of the dielectric constant of the substrates as well as the variations of the surface resistance of the line patterns in the metal multilayers have been obtained. Local surface resistances at 3GHz have been measured on microwave devices prepared with laser ablated YBaCuO thin films, which helps in evaluating the performance of the devices.
引用
收藏
页码:2651 / 2652
页数:2
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