Highly Efficient Color Separation and Focusing in the Sub-micron CMOS Image Sensor

被引：5
|
作者：
Yun, Seokho [1 ]
Roh, Sookyoung [1 ]
Lee, Sangyun [1 ]
Park, Hongkyu [1 ]
Lim, Minwoo [1 ]
Ahn, Sungmo [1 ]
Choo, Hyuck [1 ]
机构：
[1] Samsung Adv Inst Technol, Suwon, Gyeonggi Do, South Korea
来源：
2021 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM) | 2021年
关键词：
D O I：
10.1109/IEDM19574.2021.9720592
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report nanoscale metaphotonic color-routing (MPCR) structure that can significantly improve the low-light performance of a sub-micron CMOS image sensor. Fabricated on the Samsung's commercial 0.8 mu m-pixel sensor, MPCR structures separate the incident light energy into appropriate color pixels at high efficiency, yielding increased quantum efficiency up to +20%. Our experimental demonstration confirms a luminance SNR improvement of +1.22 dB under low light condition of 5 lux, accompanied with a comparably low color reproduction error and great angular tolerant response.
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页数：4
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