Highly Efficient Color Separation and Focusing in the Sub-micron CMOS Image Sensor

被引：5

作者：

Yun, Seokho ^{[1
]}

Roh, Sookyoung ^{[1
]}

Lee, Sangyun ^{[1
]}

Park, Hongkyu ^{[1
]}

Lim, Minwoo ^{[1
]}

Ahn, Sungmo ^{[1
]}

Choo, Hyuck ^{[1
]}

机构：

[1] Samsung Adv Inst Technol, Suwon, Gyeonggi Do, South Korea

来源：

2021 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM) | 2021年

关键词：

D O I：

10.1109/IEDM19574.2021.9720592

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report nanoscale metaphotonic color-routing (MPCR) structure that can significantly improve the low-light performance of a sub-micron CMOS image sensor. Fabricated on the Samsung's commercial 0.8 mu m-pixel sensor, MPCR structures separate the incident light energy into appropriate color pixels at high efficiency, yielding increased quantum efficiency up to +20%. Our experimental demonstration confirms a luminance SNR improvement of +1.22 dB under low light condition of 5 lux, accompanied with a comparably low color reproduction error and great angular tolerant response.

引用

页数：4

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