Nanoscale Strain Imaging using Coherent X-ray Light Sources

Coherence properties available from the advanced X-ray synchrotrons and X-ray Free Electron Laser sources bring the opportunities to get new information of the dynamics and local structures non-destructively. Here we review recent progress of the coherent X-ray diffraction imaging technique for measuring internal strain distribution of the nanomaterial systems. We introduce the general coherence properties of the sources and show the fundamental principle and technical aspects of the technique. Some examples of the applications are shown for various nanostructures, grains in polycrystalline films, and semiconducting devices even with in situ and operando conditions. We discuss the future development of the technique in terms of the understanding and control of the strains, which are very crucial in nanomaterial design and applications.