Kelvin test structure for measuring contact resistance of shallow junctions

被引:0
|
作者
Nanver, LK [1 ]
Goudena, EJG [1 ]
Slabbekoorn, J [1 ]
机构
[1] DELFT UNIV TECHNOL,DIMES IC PROC RES SECTOR,NL-2600 GB DELFT,NETHERLANDS
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:241 / 245
页数:5
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