Embedded Nonvolatile Memory Technology

被引:3
|
作者
Baker, Kelly [1 ]
机构
[1] Freescale Semicond, Austin, TX 78735 USA
关键词
Embedded NVM; source-side programming; split gate bit cell;
D O I
10.1109/ICICDT.2009.5166292
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper discusses the optimization of embedded Nonvolatile Memories (NVMs) for today's semiconductor applications. Process, design and device technology for embedded NVMs are surveyed, with a focus on bit cell selection, program/erase techniques, and emerging trends in the industry. Split-gate cells employing source-side programming, along with the use of nitride or nanocrystal charge storage, are shown to be good choices for an increasingly broad set of eNVM applications.
引用
收藏
页码:185 / 189
页数:5
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