Electrochemical micro/nano-machining: principles and practices

被引：68
|
作者：
Zhan, Dongping [1 ]
Han, Lianhuan
Zhang, Jie
He, Quanfeng
Tian, Zhao-Wu
Tian, Zhong-Qun [1 ]
机构：
[1] Xiamen Univ, State Key Lab Phys Chem Solid Surfaces PCOSS, Collaborat Innovat Ctr Chem Energy Mat iChEM, Xiamen 361005, Peoples R China
来源：
CHEMICAL SOCIETY REVIEWS | 2017年 / 46卷 / 05期
基金：
中国国家自然科学基金;
关键词：
HIGH-ASPECT-RATIO; CHEMICAL-MECHANICAL PLANARIZATION; FERMI-LEVEL EQUILIBRATION; TOTAL ANALYSIS SYSTEMS; ION-BEAM; SILICON NANOWIRES; STAINLESS-STEEL; N-GAAS; NANOIMPRINT LITHOGRAPHY; ELECTROLESS DEPOSITION;
D O I：
10.1039/c6cs00735j
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Micro/nano-machining (MNM) is becoming the cutting-edge of high-tech manufacturing because of the increasing industrial demand for supersmooth surfaces and functional three-dimensional micro/nano-structures (3D-MNS) in ultra-large scale integrated circuits, microelectromechanical systems, miniaturized total analysis systems, precision optics, and so on. Taking advantage of no tool wear, no surface stress, environmental friendliness, simple operation, and low cost, electrochemical micro/nano-machining (EC-MNM) has an irreplaceable role in MNM. This comprehensive review presents the state-of-art of EC-MNM techniques for direct writing, surface planarization and polishing, and 3D-MNS fabrications. The key point of EC-MNM is to confine electrochemical reactions at the micro/nano-meter scale. This review will bring together various solutions to "confined reaction'' ranging from electrochemical principles through technical characteristics to relevant applications.
引用
收藏
页码：1526 / 1544
页数：19
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