Experiments using a nano-machining instrument for nano-cutting brittle materials

This paper presents a nano-machining instrument, which was developed for conducting nano-cutting experiments especially on brittle materials. A PZT tube scanner is employed to accomplish a maximum depth of cut of 4 μm with 0.1 nm resolution, and a length of cut of 20 μm. The cutting motions are feedback-controlled by using the output of a capacitance probe. There are two force sensors to measure thrust and cutting forces with a resolution of sub-milliNewtons. The sample is kinematically mounted on the PZT scanner, and the tilt of the sample can be adjusted precisely. Experiments of nano-scratching and nano-cutting on single crystal silicon were carried out.