Development of ultra-precision machining system with unique wire EDM tool fabrication system for micro/nano-machining

被引：69

作者：

Cheng, X. ^{[1
]}

Nakamoto, K. ^{[2
]}

Sugai, M. ^{[2
]}

Matsumoto, S. ^{[2
]}

Wang, Z. G. ^{[1
]}

Yamazaki, K. ^{[1
]}

机构：

[1] Univ Calif Davis, Dept Mech & Aeronaut Engn, Davis, CA 95616 USA

[2] Sodick Co Ltd, Yokohama, Kanagawa, Japan

来源：

CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2008年 / 57卷 / 01期

关键词：

ultra-precision machine tool; wire EDM; ductile mode micromachining;

D O I：

10.1016/j.cirp.2008.03.137

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Aiming at quality machining of very hard materials with nanometer level surface quality and 0.1 mu m dimensional accuracy, an ultra-precision machining system has been developed. The machine has feed axes accompanied by the counter motion mechanism driven at the center of gravity to eliminate the vibration caused by high acceleration/deceleration. A custom tool fabrication system consists of a 6-axis wire EDM machine and dedicated custom tool CAM system. High quality machining of sophisticated three-dimensional (3D) products made of tungsten carbide has successfully been demonstrated on the developed machine tool with custom-made PCD cutters fabricated by the tool fabrication system. (c) 2008 CIRP.

引用

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页码：415 / 420

页数：6

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