Body doping;
Current;
DGFET;
DIBL;
Mobility;
Modeling;
MOSFET;
Short-channel;
Sub-threshold slope;
Velocity saturation;
THRESHOLD VOLTAGE MODEL;
SOI;
SI;
D O I:
10.1016/j.sse.2009.05.008
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
A closed form inversion charge-based drain current model for a short channel symmetrically driven, lightly doped symmetric double-gate MOSFET (SDGFET) is presented. The model has physical origins, but has some fitting parameters included in order to yield a better match with TCAD device simulations. Velocity saturation and channel length modulation effects are self-consistently included in the model. The incorporation of DIBL effects in the model is based on a solution of the two-dimensional Laplace equation that had been reported earlier and that is believed to be especially suited when the physical gate-oxide thickness is not negligible compared to the silicon body thickness. Addition of support for body doping and low-field mobility degradation is also presented. A very good match is shown in I-d-V-g, I-d-V-d and g(DS)-V-d curves and a reasonable match is shown in g(m)-V-g curves, when compared with 2D device simulations. The match in various characteristics is shown for devices as short as 20 nm. (C) 2009 Elsevier Ltd. All rights reserved.
机构:
Hong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Kowloon, Hong Kong, Peoples R ChinaHong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Kowloon, Hong Kong, Peoples R China
Yin, CS
Chan, PCH
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机构:
Hong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Kowloon, Hong Kong, Peoples R ChinaHong Kong Univ Sci & Technol, Dept Elect & Elect Engn, Kowloon, Hong Kong, Peoples R China