Modelling and analysis of gate leakage current and its wafer level variability in advanced FD-SOI MOSFETs

The gate leakage current in advanced FD-SOI devices are investigated using systematic measurements on multiple geometry devices from 14 nm node. A simple model with an equivalent trapezoidal barrier based on WKB approximation is introduced and verified on the different measurements. The wafer level variability of the leakage current is explored using statistical modelling and the simple model for gate leakage current. The pure physical sources of variation are identified and the scaling trends of the standard deviations of the sources are analysed. The methodology and models have been validated also on 28 nm node devices.