Induced-Stress Analysis of SU-8 Polymer Based Single Mass 3-Axis Piezoresistive MEMS Accelerometer

被引：1

作者：

Ahmed, Aftab ^{[1
]}

Pandit, Shardul ^{[1
]}

Patkar, Rajul ^{[1
]}

Dixit, Pradeep ^{[1
]}

Baghini, Maryam Shojaei ^{[1
]}

Khlifi, Awatef ^{[2
]}

Tounsi, Fares ^{[2
,3
]}

Mezghani, Brahim ^{[2
]}

机构：

[1] Indian Inst Technol, Dept Elect Engn, Mumbai, Maharashtra, India

[2] Univ Sfax, Ecole Natl Ingenieurs Sfax, METS Res Unit, Sfax, Tunisia

[3] Univ Monastir, ISIMM, Monastir, Tunisia

来源：

2019 16TH INTERNATIONAL MULTI-CONFERENCE ON SYSTEMS, SIGNALS & DEVICES (SSD) | 2019年

关键词：

SU-8; polymer; FEM-analysis; piezoresistive; MEMS; accelerometer; DESIGN; PERFORMANCE; SYSTEM;

D O I：

10.1109/ssd.2019.8893246

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the induced-stress analysis of an SU-8 polymer based 3-axis piezoresistive MEMS accelerometer having a single proof mass along with proposed fabrication process flow. Polymer accelerometers are simple to fabricate and have better sensitivity because of their lower Young's modulus. It is also easy to integrate any highly sensitive piezoresistive material as a layer to further enhance the performance. In this work, structural design and push-pull mechanism of the beam and its use to achieve the desired results have been explained. Using basic structural analysis, locations of the maximum induced stress are identified. For acceleration of 100 g and 1 g, the proposed design has been investigated for the stress field in the structure and shown the improvement by comparing the performance with two published design presented in the paper. The proposed fabrication process is compatible with several piezoresistive materials such as ZnO nanorods, graphene and carbon nanotubes (CNTs).

引用

页码：131 / 136

页数：6

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