Analysis of high-k passivation-layer effects on buffer-related breakdown and current collapse in AlGaN/GaN HEMTs

被引:3
|
作者
Satoh, Yoshiki [1 ]
Hanawa, Hideyuki [1 ]
Nakajima, Atsushi [1 ]
Horio, Kazushige [1 ]
机构
[1] Shibaura Inst Technol, Fac Syst Engn, Saitama 3378570, Japan
关键词
ELECTRON-MOBILITY TRANSISTORS; GATE-LAG PHENOMENA; FIELD-PLATE; 2-DIMENSIONAL ANALYSIS; CURRENT TRANSIENTS; RECESSED-GATE; GAAS-MESFETS; IMPACT-IONIZATION; SURFACE-STATE; VOLTAGE;
D O I
10.7567/JJAP.54.031002
中图分类号
O59 [应用物理学];
学科分类号
摘要
We analyze breakdown characteristics and current collapse in AlGaN/GaN HEMTs, with the passivation layer's relative permittivity er as a parameter. It is shown that the off-state breakdown voltage is considerably enhanced by introducing a high-k passivation layer because the electric field at the drain edge of the gate is weakened and the buffer leakage current is reduced. The breakdown voltage in the high-epsilon(r) region increases when the gate voltage is changed from -8 to -10V, because the buffer leakage current is reduced. It is also shown that drain lag and current collapse in AlGaN/GaN HEMTs could be reduced by introducing a high-k thick passivation layer, because the electric field at the drain edge of the gate is reduced, leading to less electron injection into the buffer layer and weaker buffer trapping effects. (C) 2015 The Japan Society of Applied Physics
引用
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页数:5
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