Analysis of high-k passivation-layer effects on buffer-related breakdown and current collapse in AlGaN/GaN HEMTs

被引:3
|
作者
Satoh, Yoshiki [1 ]
Hanawa, Hideyuki [1 ]
Nakajima, Atsushi [1 ]
Horio, Kazushige [1 ]
机构
[1] Shibaura Inst Technol, Fac Syst Engn, Saitama 3378570, Japan
关键词
ELECTRON-MOBILITY TRANSISTORS; GATE-LAG PHENOMENA; FIELD-PLATE; 2-DIMENSIONAL ANALYSIS; CURRENT TRANSIENTS; RECESSED-GATE; GAAS-MESFETS; IMPACT-IONIZATION; SURFACE-STATE; VOLTAGE;
D O I
10.7567/JJAP.54.031002
中图分类号
O59 [应用物理学];
学科分类号
摘要
We analyze breakdown characteristics and current collapse in AlGaN/GaN HEMTs, with the passivation layer's relative permittivity er as a parameter. It is shown that the off-state breakdown voltage is considerably enhanced by introducing a high-k passivation layer because the electric field at the drain edge of the gate is weakened and the buffer leakage current is reduced. The breakdown voltage in the high-epsilon(r) region increases when the gate voltage is changed from -8 to -10V, because the buffer leakage current is reduced. It is also shown that drain lag and current collapse in AlGaN/GaN HEMTs could be reduced by introducing a high-k thick passivation layer, because the electric field at the drain edge of the gate is reduced, leading to less electron injection into the buffer layer and weaker buffer trapping effects. (C) 2015 The Japan Society of Applied Physics
引用
收藏
页数:5
相关论文
共 50 条
  • [21] TCAD study of high breakdown voltage AlGaN/GaN HEMTs with embedded passivation layer
    Wu, Jianfeng
    Xu, Conghui
    Fan, Yangtao
    Liu, Xingyi
    Zhong, Zhibai
    Yin, Jun
    Zhang, Chunmiao
    Li, Jing
    Kang, Junyong
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2022, 55 (38)
  • [22] Influence of pit defects on AlGaN surface and dislocation defects in GaN buffer layer on current collapse of AlGaN/GaN HEMTs
    Xi Guang-Yi
    Ren Fan
    Hao Zhi-Biao
    Wang Lai
    Li Hong-Tao
    Jiang Yang
    Zhao Wei
    Han Yan-Jun
    Luo Yi
    ACTA PHYSICA SINICA, 2008, 57 (11) : 7238 - 7243
  • [23] Analysis of backside-electrode and gate-field-plate effects on buffer-related current collapse in AlGaN/GaN high electron mobility transistors
    Horio, Kazushige
    Onodera, Hiraku
    Nakajima, Atsushi
    JOURNAL OF APPLIED PHYSICS, 2011, 109 (11)
  • [24] Impact of Moisture and Fluorocarbon Passivation on the Current Collapse of AlGaN/GaN HEMTs
    Gao, Feng
    Chen, Di
    Lu, Bin
    Tuller, Harry L.
    Thompson, Carl V.
    Keller, Stacia
    Mishra, Umesh K.
    Palacios, Tomas
    IEEE ELECTRON DEVICE LETTERS, 2012, 33 (10) : 1378 - 1380
  • [25] Analysis of lags and current collapse in field-plate AlGaN/GaN HEMTs with deep acceptors in a buffer layer
    Noda, Naohiro
    Tsurumaki, Ryouhei
    Horio, Kazushige
    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 13 NO 5-6, 2016, 13 (5-6): : 341 - 344
  • [26] Analysis of Impact Ionization Effects on Current Collapse of AlGaN/GaN HEMTs
    Onodera, Hiraku
    Kabemura, Toshiaki
    Horio, Kazushige
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2022, 69 (11) : 6028 - 6034
  • [27] Passivation-layer thickness and field-plate optimization to obtain high breakdown voltage in AlGaN/GaN HEMTs with short gate-to-drain distance
    Iwamoto, Takuma
    Akiyama, Seiya
    Horio, Kazushige
    MICROELECTRONICS RELIABILITY, 2021, 121
  • [28] High breakdown voltage AlGaN/GaN HEMT with high-K/low-K compound passivation
    Du, Jiangfeng
    Chen, Nanting
    Pan, Peilin
    Bai, Zhiyuan
    Li, Liang
    Mo, Jianghui
    Yu, Qi
    ELECTRONICS LETTERS, 2015, 51 (01) : 104 - U117
  • [29] Effect of Acceptor Traps in GaN Buffer Layer on Breakdown Performance of AlGaN/GaN HEMTs
    Ma, Maodan
    Cao, Yanrong
    Lv, Hanghang
    Wang, Zhiheng
    Zhang, Xinxiang
    Chen, Chuan
    Wu, Linshan
    Lv, Ling
    Zheng, Xuefeng
    Tian, Wenchao
    Ma, Xiaohua
    Hao, Yue
    MICROMACHINES, 2023, 14 (01)
  • [30] Current collapse suppression in AlGaN/GaN HEMTs using dual-layer SiNx stressor passivation
    Deng, Chenkai
    Cheng, Wei-Chih
    Chen, XiGuang
    Wen, KangYao
    He, MingHao
    Tang, ChuYing
    Wang, Peiran
    Wang, Qing
    Yu, HongYu
    APPLIED PHYSICS LETTERS, 2023, 122 (23)