Analysis of high-k passivation-layer effects on buffer-related breakdown and current collapse in AlGaN/GaN HEMTs

被引:3
|
作者
Satoh, Yoshiki [1 ]
Hanawa, Hideyuki [1 ]
Nakajima, Atsushi [1 ]
Horio, Kazushige [1 ]
机构
[1] Shibaura Inst Technol, Fac Syst Engn, Saitama 3378570, Japan
关键词
ELECTRON-MOBILITY TRANSISTORS; GATE-LAG PHENOMENA; FIELD-PLATE; 2-DIMENSIONAL ANALYSIS; CURRENT TRANSIENTS; RECESSED-GATE; GAAS-MESFETS; IMPACT-IONIZATION; SURFACE-STATE; VOLTAGE;
D O I
10.7567/JJAP.54.031002
中图分类号
O59 [应用物理学];
学科分类号
摘要
We analyze breakdown characteristics and current collapse in AlGaN/GaN HEMTs, with the passivation layer's relative permittivity er as a parameter. It is shown that the off-state breakdown voltage is considerably enhanced by introducing a high-k passivation layer because the electric field at the drain edge of the gate is weakened and the buffer leakage current is reduced. The breakdown voltage in the high-epsilon(r) region increases when the gate voltage is changed from -8 to -10V, because the buffer leakage current is reduced. It is also shown that drain lag and current collapse in AlGaN/GaN HEMTs could be reduced by introducing a high-k thick passivation layer, because the electric field at the drain edge of the gate is reduced, leading to less electron injection into the buffer layer and weaker buffer trapping effects. (C) 2015 The Japan Society of Applied Physics
引用
收藏
页数:5
相关论文
共 50 条
  • [31] Silicon dioxide passivation of AlGaN/GaN HEMTs for high breakdown voltage
    Ha, Min-Woo
    Lee, Seung-Chul
    Park, Joong-Hyun
    Her, Jin-Cherl
    Seo, Kwang-Seok
    Han, Min-Koo
    PROCEEDINGS OF THE 18TH INTERNATIONAL SYMPOSIUM ON POWER SEMICONDUCTOR DEVICES & ICS, 2006, : 169 - +
  • [32] Impact of Substrate Bias Polarity on Buffer-Related Current Collapse in AlGaN/GaN-on-Si Power Devices
    Yang, Shu
    Zhou, Chunhua
    Han, Shaowen
    Wei, Jin
    Sheng, Kuang
    Chen, Kevin J.
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2017, 64 (12) : 5048 - 5056
  • [33] Analysis of Reduction in Lag Phenomena and Current Collapse in Field-Plate AlGaN/GaN HEMTs With High Acceptor Density in a Buffer Layer
    Saito, Yasunori
    Tsurumaki, Ryuhei
    Noda, Naohiro
    Horio, Kazushige
    IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, 2018, 18 (01) : 46 - 53
  • [34] Analysis of Breakdown Characteristics of AlGaN/GaN HEMTs with Double Passivation Layers
    Nakano, K.
    Hanawa, H.
    Horio, K.
    2018 1ST WORKSHOP ON WIDE BANDGAP POWER DEVICES AND APPLICATIONS IN ASIA (WIPDA ASIA), 2018, : 131 - 134
  • [35] High Breakdown Voltage and Low-Current Dispersion in AlGaN/GaN HEMTs With High-Quality AlN Buffer Layer
    Kim, Jeong-Gil
    Cho, Chuyoung
    Kim, Eunjin
    Hwang, Jae Seok
    Park, Kyung-Ho
    Lee, Jung-Hee
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2021, 68 (04) : 1513 - 1517
  • [36] Analysis of buffer-trapping effects on gate lag, drain lag and current collapse in AlGaN/GaN HEMTs
    Horio, K.
    Nakajima, A.
    PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 5, NO 6, 2008, 5 (06): : 1898 - 1901
  • [37] Breakdown Enhancement and Current Collapse Suppression by High-Resistivity GaN Cap Layer in Normally-Off AlGaN/GaN HEMTs
    Hao, Ronghui
    Li, Weiyi
    Fu, Kai
    Yu, Guohao
    Song, Liang
    Yuan, Jie
    Li, Junshuai
    Deng, Xuguang
    Zhang, Xiaodong
    Zhou, Qi
    Fan, Yaming
    Shi, Wenhua
    Cai, Yong
    Zhang, Xinping
    Zhang, Baoshun
    IEEE ELECTRON DEVICE LETTERS, 2017, 38 (11) : 1567 - 1570
  • [38] Physical Mechanism of Buffer-Related Current Transients and Current Slump in AlGaN/GaN High Electron Mobility Transistors
    Horio, Kazushige
    Nakajima, Atsushi
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2008, 47 (05) : 3428 - 3433
  • [39] Trapping Effects on Leakage and Current Collapse in AlGaN/GaN HEMTs
    Niketa Sharma
    C. Periasamy
    Nitin Chaturvedi
    Nidhi Chaturvedi
    Journal of Electronic Materials, 2020, 49 : 5687 - 5697
  • [40] Trapping Effects on Leakage and Current Collapse in AlGaN/GaN HEMTs
    Sharma, Niketa
    Periasamy, C.
    Chaturvedi, Nitin
    Chaturvedi, Nidhi
    JOURNAL OF ELECTRONIC MATERIALS, 2020, 49 (10) : 5687 - 5697